JPH0746870Y2 - クリーンルームにおける精密機器支持構造 - Google Patents
クリーンルームにおける精密機器支持構造Info
- Publication number
- JPH0746870Y2 JPH0746870Y2 JP1990033112U JP3311290U JPH0746870Y2 JP H0746870 Y2 JPH0746870 Y2 JP H0746870Y2 JP 1990033112 U JP1990033112 U JP 1990033112U JP 3311290 U JP3311290 U JP 3311290U JP H0746870 Y2 JPH0746870 Y2 JP H0746870Y2
- Authority
- JP
- Japan
- Prior art keywords
- support
- clean room
- precision equipment
- vibration
- arc
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000463 material Substances 0.000 claims description 13
- 230000005540 biological transmission Effects 0.000 claims description 12
- 230000005484 gravity Effects 0.000 claims description 6
- 229910000831 Steel Inorganic materials 0.000 description 15
- 239000010959 steel Substances 0.000 description 15
- 239000002245 particle Substances 0.000 description 7
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 6
- 229910052802 copper Inorganic materials 0.000 description 6
- 239000010949 copper Substances 0.000 description 6
- 230000003014 reinforcing effect Effects 0.000 description 6
- 239000004568 cement Substances 0.000 description 5
- 230000000644 propagated effect Effects 0.000 description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 229920001971 elastomer Polymers 0.000 description 4
- 230000007257 malfunction Effects 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 239000005060 rubber Substances 0.000 description 4
- 239000011159 matrix material Substances 0.000 description 3
- 230000002411 adverse Effects 0.000 description 2
- 230000003749 cleanliness Effects 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 239000003822 epoxy resin Substances 0.000 description 2
- 238000004898 kneading Methods 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000004570 mortar (masonry) Substances 0.000 description 2
- 229920000647 polyepoxide Polymers 0.000 description 2
- 239000012779 reinforcing material Substances 0.000 description 2
- 239000004576 sand Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 230000002950 deficient Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 230000001902 propagating effect Effects 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
Landscapes
- Floor Finish (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990033112U JPH0746870Y2 (ja) | 1990-03-29 | 1990-03-29 | クリーンルームにおける精密機器支持構造 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990033112U JPH0746870Y2 (ja) | 1990-03-29 | 1990-03-29 | クリーンルームにおける精密機器支持構造 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH03124098U JPH03124098U (en]) | 1991-12-17 |
| JPH0746870Y2 true JPH0746870Y2 (ja) | 1995-10-25 |
Family
ID=31536505
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1990033112U Expired - Lifetime JPH0746870Y2 (ja) | 1990-03-29 | 1990-03-29 | クリーンルームにおける精密機器支持構造 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0746870Y2 (en]) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4527146B2 (ja) * | 2007-11-12 | 2010-08-18 | 幸雄 広瀬 | 美容用シート |
| JP4995981B1 (ja) * | 2011-10-19 | 2012-08-08 | 進一 塚本 | パック用シート及びその用法 |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62149686U (en]) * | 1986-03-17 | 1987-09-22 | ||
| JPS6314025A (ja) * | 1986-06-30 | 1988-01-21 | Hitachi Plant Eng & Constr Co Ltd | 防振基礎構造 |
-
1990
- 1990-03-29 JP JP1990033112U patent/JPH0746870Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH03124098U (en]) | 1991-12-17 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| EXPY | Cancellation because of completion of term |